Tip-Tilt Nano Mechanisms

日本語名表記

Closed and open loop Nanopositioning solutions for semiconductor manufacture, beam steering, interferometry and precision engineering..

  • NPS-Theta-2A

  • The Queensgate NPS-Theta-2A has been developed for applications requiring ultra-high precision positioning of mirrors in optical inspection and imaging systems. The mirror is simply fixed onto the tilting platform of the stage to provide > 2 milliradians of travel with sub micro-radian resolution.
  • NPS-Theta-Gamma-2B

  • The Queensgate NPS-Theta-Gamma-2B has been developed for applications requiring ultra-high precision positioning of large mirrors in optical inspection and imaging systems. The mirror is simply fixed onto the tilting platform of the stage to provide > 2 milli-radians of travel with sub micro-radian resolution.
  • XPS-Theta-Gamma-2A

  • The XPS-Theta-Gamma-2A has been developed for applications requiring high speed positioning of mirrors in optical inspection and imaging systems. The mirror is simply fixed onto the tilting platform of the stage to provide > 2 milliradians of travel with sub micro-radian resolution.
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